您当前的位置: 产品与应用 > KrF深紫外光刻胶系列
KrF深紫外光刻胶系列
Kind 型号 Performance 性 能 Application 应 用 DK1081 R:0.18μm,Thickness range:0.4um-0.8μm AA/Poly/CT DK1080 R:0.25μm,Thickness range:0.55μm-1.0μm Implant/AA/CT DK1088 R:0.25μm,Thickness range:0.8μm-1.4μm TV/TM/Implant DK1089 R:0.25μm,Thickness range:0.8μm-1.4μm TV/TM/Implant DK1087 R:1μm,Thickness range:3-4μm Special application/ PAD DK2060 R:0.25μm,Thickness:0.55-0.8μm Contact/Hole DK3030 R:0.25μm,Thickness:0.6-0.8μm AA/Metal/Contact/Hole DKN1100 Krf Negative PR R:0.20μm,Thickness:0.4-0.8μm SAB/Implant
